0.4¦Ìm sub-micron focus tube has achievedHigh-resolution, High-brightness,and High-magnification.
TUX-3000W
0.4¦Ìm Resolution and ¡ß6000 Magnification Our continuous efforts have achieved the 0.4¦Ìm resolution without losing contrast and clearness of subject image at low voltage. Our original LaB6 (lanthanum hexa-boride) filament has made it possible. And triple electro-magnetic lens system provides a less distorted image even at ¡ß6000 high magnification. By these features, user can effectively inspect internal structures of miniaturized samples, such as IC devices, FCP, BGA, MEMS, and so on
Easy Operation Control system with auto-focus and auto-alignment, several automatic inspection modes, and easy mouse-operation are available.
Longer Life Time Our original X-ray tube with LaB6 filament, which has the longest life time as an open-type X-ray tube, enables to save running costs.
Vibration Cancel Structure Vibration, which could have bad influence upon the accuracy of inspection, can be eliminated by built-in vibration cancel structure.
Various Options Eucentric specimen stage, CT scanning, and Heating device are available as options.
Product specification
Product name
TUX-3000W
X-ray tube type
Open type tube (vacuum pumped)
Tube voltage
40kV ¡Á 120kV
Detail Detectability
0.4 ¡Á 3.0microns (0.4microns@40kV)
Geometric magnification
1500¡ß
Total Magnification
3000¡ß
Manipulation system
5-Axes precision manipulator : standard
9-Axes high-precision manipulator : option
